Back to jobs
Tesla

Sr. Process Engineer, Implant, Terafab

Austin, TexasPosted 4 days ago
remote

Job Description

Description: Terafab is building a vertically integrated semiconductor factory at an unprecedented scale. The facility brings logic, memory, packaging, test, and lithography mask production under one roof, optimized for rapid iteration and maximum compute density per square foot. 

Process engineering is the discipline that turns Terafab technology into reality, atom by atom. This role owns ion implantation processes across three distinct chip families: edge-inference processors, space-hardened data center AI chips for orbital satellites, and high-bandwidth memory. The engineer will develop and optimize dopant implantation, profile control, and stress engineering while balancing junction performance, thermal budget compatibility, defectivity, and integration constraints across radically different product requirements.  This is a highly hands-on role requiring deep expertise in ion implantation while collaborating closely with diffusion/anneal, thin films, etch, CMP, metallization, photo, metrology, and integration teams in one of the most ambitious fab programs in the world.

Responsibilities: Develop and qualify high-current, medium-current, and low-energy ion implantation processes, including source/drain, substrate, channel, well, and halo implants for logic and memory devices 

Optimize critical implant parameters: dopant species, energy, dose, tilt, rotation, beam current, and damage engineering to achieve precise junction profiles, sheet resistance, and leakage performance 

Own ion implant processes end-to-end: from tool installation and qualification through recipe development, beam setup optimization, particle and metal contamination control, and HVM handoff 

Qualify implant tools from installation to production readiness, including beam calibration, uniformity, angle control, wafer charging management, and chamber matching 

Analyze implant process, dopant distribution, and device performance using first-principles, physics-based approaches to understand implantation mechanisms, amorphization, channeling, and transient enhanced diffusion (TED) interactions 

Lead root cause analysis for profile shifts, device param variation, and yield issues; establish inline metrology and control strategies; and drive systematic yield improvement 

Support 24/7 manufacturing operations through rotations, on-call availability, and rapid response to critical production issues 

Drive development of next-generation implantation techniques, including plasma doping (PLAD) and advanced damage/activation strategies for sub-2nm nodes and specialized applications

Requirements: Degree in Chemical Engineering, Materials Science, Electrical Engineering, Physics, or equivalent experience 

5+ years of hands-on ion implantation process and integration engineering experience in a semiconductor fab, with strong focus on advanced logic or memory technologies 

Deep expertise in ion implanters 

Proven track record establishing Process of Record (POR) for critical implant steps at advanced nodes 

Proficiency with implant metrology 

Strong DOE skills and statistical analysis capability  

Excellent collaboration skills with the ability to work proactively across diffusion/anneal, thin films, integration, and equipment engineering teams 

Passion for ambitious, vertically integrated semiconductor programs and building high-performance compute technologies

Sr. Process Engineer, Implant, Terafab at Tesla | Renata